Lithography
	Категория: Технические науки » Электроника, радиотехника, связь
		Автор: Michael Wang Издательство: Intech Год издания: 2010 isbn: 9533070641 Количество страниц: 678 Язык: english Формат: PDF Размер: 78 Мб Каталожный номер: 44969	Lithography, the fundamental fabrication process of semiconductor devices, is playing a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. Traditional optical lithography (photolithography) including contact and project photolithography has contributed significantly to the semiconductor device advancements. As the resolution requirement increases for fabrication of finer and smaller components and devices, the technological dependence on photolithography becomes a serious problem since the photolithography resolution is restricted by the diffraction limitation of optics. Reducing the light wavelength from blue to near ultraviolet (UV) and to deep UV is expected to improve the photolithography resolution, but it is far not enough to catch up with the pace in resolution demand in integrated circuit fabrication.
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	0 Опубликовал: toksoft | 25-11-2010, 07:10 | Просмотров: 769   Комментарии (0)  Печать